Characteristics of Surface Cleaning by Consecutive Pulse-Air-Jets

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  • NAMIKI Norikazu
    Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University
  • OTANI Yoshio
    Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University
  • EMI Hitoshi
    Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University

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Other Title
  • パルスエアジェット洗浄法の表面洗浄特性
  • パルス エア ジェット センジョウホウ ノ ヒョウメン センジョウ トクセイ

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Abstract

Pulse-air-jet blow is effective for the removal of fine particles from surfaces. In the present work, the removal characteristics of PSL particles from a wafer surface were investigated by measuring the distribution of removal efficiency on wafer surface. The influence of slit width of rectangular air-jet nozzle and the impinging angle of air-jet on the distribution of removal efficiency were experimentally studied. As a result, it was found that the relationship between a cleaned area with a removal efficiency greater than a given removal efficiency and the removal efficiency is expressed by a Rosin-Rammler distribution, and the shape of the distribution is invariant with the number of pulse-air-jet blows although the cleaned area increases with the number of blows. Further, experimental results showed that there exists optimal values in the slit width of air-jet nozzle and the impinging angle of air-jet for cleaning a wider area with a higher removal efficiency.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 13 (2), 127-132, 1998

    Japan Association of Aerosol Science and Technology

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