フィルタリーク試験に関する統計的考察 A Statistical Study on Filter Leakage Test

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著者

    • 西村 直也 NISHIMURA Naoya
    • 名古屋工業大学大学院ベンチャービジネスラボラトリー Venture Business Laboratory, Nagoya Institute of Technology
    • 藤井 修二 FUJII Shuji
    • 東京工業大学大学院情報理工学研究科 Graduate School of Information Science and Technology, Tokyo Institute of Technology
    • 湯浅 和博 YUASA Kazuhiro
    • 東京工業大学工学部建築学科 Department of Architecture and Building Engineering, Tokyo Institute of Technology

抄録

This study proposes a statistical leakage testing method for HEPA and ULPA filters used in cleanrooms. The method consists of two parts, scanning test and stationary re-measuring test. For scanning test, a high-speed and accurate method is proposed considering the influences of particles penetrating through the normal portion of filter and the discreteness of particle measuring. For stationary re-measuring test, a method to minimize the number of data is proposed by using Wald's theory. The validity of this method is investigated by Monte-Carlo simulation, and the influence of variance of parameters which is assumed to vary, is examined. It is concluded that the variance of probe scan speed and upstream particle concentration have a strong influence on the results of scanning test. It is also concluded that we can obtain stable and accurate result in stationary re-measuring, and it is indicated that by using this method a big hole can be readily ditected as a leakage point.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research  

    エアロゾル研究 = Journal of aerosol research 14(2), 119-128, 1999-06-20 

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10002783361
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    4775288
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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