ゾルーゲルPZT薄膜を利用した微小力センサープローブの開発(第二報)
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- LEE Chengkuo
- The University of Tokyo
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- ITOH Toshihiro
- The University of Tokyo
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- SUGA Tadatomo
- The University of Tokyo
Bibliographic Information
- Other Title
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- Development of Microcantilever for Piezoelectric Force Sensor Based on Sol-Gel Derived PZT Thin Films(II)
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Journal
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- 精密工学会大会学術講演会講演論文集
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精密工学会大会学術講演会講演論文集 1995 (2), 863-864, 1995-09-01
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Details
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- CRID
- 1573668923843356928
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- NII Article ID
- 10002805477
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- NII Book ID
- AN1018673X
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- Text Lang
- en
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- Data Source
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- CiNii Articles