ゾルーゲルPZT薄膜を利用した微小力センサープローブの開発(第二報)

Bibliographic Information

Other Title
  • Development of Microcantilever for Piezoelectric Force Sensor Based on Sol-Gel Derived PZT Thin Films(II)

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Details

  • CRID
    1573668923843356928
  • NII Article ID
    10002805477
  • NII Book ID
    AN1018673X
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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