Modulated pitch phase grating for optical encoder independent of the air gap

• POSADA P.

  Department of Mechatronics and Precision Engineering, Tohoku University

• HANE K.

  Department of Mechatronics and Precision Engineering, Tohoku Universit

• IEKI A.

  Okuma Go. Ltd.

• MATSUI K.

  Okuma Go. Ltd.

• NASHIKI M.

  Okuma Go. Ltd.

Journal

• 精密工学会大会学術講演会講演論文集

  精密工学会大会学術講演会講演論文集 1996 (1), 1103-1104, 1996-03-01

Details

• CRID: 1572261548959731072
• NII Article ID: 10002807437
• NII Book ID: AN1018673X
• Text Lang: en
• Data Source:
  • CiNii Articles