Electron Swarm Characteristics in Gas Mixtures Containing CF₄

• Itoh Hidenori

  Muroran Institute of Technology

• Inomata Madoka

  NTT

• Matsumura Toshiaki

  Mitsubishi Electric Corporation

• Satoh Kohki

  Muroran Institute of Technology

• Suzuki Yoshio

  Muroran Institute of Technology

• Nakao Yoshitaka

  Muroran Institute of Technology

• Tagashira Hiroaki

  Hokkaido University

Bibliographic Information

Other Title

• CF₄を含む混合ガスの電子輸送特性
• CF4を含む混合ガスの電子輸送特性
• CF4 オ フクム コンゴウ ガス ノ デンシ ユソウ トクセイ

Abstract

The electron swarm characteristics in gas mixtures containing CF₄ has been analysed over the E/N range 0.01-566Td by a multi-term Boltzmann equation method and by a Monte Carlo simulation. The differences between CF₄ and Ar, and CF₄ and N₂ mixtures, in electron transport coefficients have been explained by the calculated electron energy distributions and the respective sets of electron collision cross-sections. The synergistic behaviour and the dielectric characteristics in these gas mixtures have been also shown and discussed in detail.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 116 (4), 328-333, 1996

  The Institute of Electrical Engineers of Japan

Keywords

• CF₄

Details

• CRID: 1390282679576672256
• NII Article ID: 130006839668
• NII Article ID: 120004681112
• NII Article ID: 10002819321
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms1990.116.4_328
• ISSN: 13475533
• ISSN: 03854205
• ISSN: http://id.crossref.org/issn/13418939
• HANDLE: 10258/1578
• NDL BIB ID: 3947179
• Web Site: https://muroran-it.repo.nii.ac.jp/records/5622
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3947179
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/116/4/116_4_328/_pdf
• Data Source:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed