Vapor-Phase Synthesis of Thin Zirconia Layers Using Micro-Wave Plasma

• OKAYAMA Hideo

  Osaka Institute of Technology

• KUBO Tsukasa

  Osaka Institute of Technology

• NAGATA Akiyoshi

  Osaka Institute of Technology

• ISA Hiromu

  Osaka Institute of Technology

Bibliographic Information

Other Title

• マイクロ波プラズマによる薄膜ジルコニアの気相合成

Journal

• 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

  電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 116 (4), 380-381, 1996-04

Keywords

• 固体電解質型燃料電池
• マグネシア安定化ジルコニア薄膜
• PECVD

Details

• CRID: 1573105973903866112
• NII Article ID: 10002819410
• NII Book ID: AN10136312
• ISSN: 03854205
• Text Lang: ja
• Data Source:
  • CiNii Articles