Vapor-Phase Synthesis of Thin Zirconia Layers Using Micro-Wave Plasma
-
- OKAYAMA Hideo
- Osaka Institute of Technology
-
- KUBO Tsukasa
- Osaka Institute of Technology
-
- NAGATA Akiyoshi
- Osaka Institute of Technology
-
- ISA Hiromu
- Osaka Institute of Technology
Bibliographic Information
- Other Title
-
- マイクロ波プラズマによる薄膜ジルコニアの気相合成
Search this article
Journal
-
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society
-
電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 116 (4), 380-381, 1996-04
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1573105973903866112
-
- NII Article ID
- 10002819410
-
- NII Book ID
- AN10136312
-
- ISSN
- 03854205
-
- Text Lang
- ja
-
- Data Source
-
- CiNii Articles