Preparation of boron nitride thin films by N_2-Ar plasma jet
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- TAKAKURA Yasushi
- Musashi Institute of Technology
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- ONO Shigeru
- Musashi Institute of Technology
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- TEII Shinriki
- Musashi Institute of Technology
Bibliographic Information
- Other Title
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- 窒素-アルゴン混合ガスプラズマジェットによる窒化ホウ素薄膜の生成
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Journal
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- 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society
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電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 116 (6), 566-567, 1996-06
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Details 詳細情報について
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- CRID
- 1572824498927213824
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- NII Article ID
- 10002819799
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- NII Book ID
- AN10136312
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- ISSN
- 03854205
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- Text Lang
- ja
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- Data Source
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- CiNii Articles