Preparation of boron nitride thin films by N_2-Ar plasma jet

• TAKAKURA Yasushi

  Musashi Institute of Technology

• ONO Shigeru

  Musashi Institute of Technology

• TEII Shinriki

  Musashi Institute of Technology

Bibliographic Information

Other Title

• 窒素-アルゴン混合ガスプラズマジェットによる窒化ホウ素薄膜の生成

Journal

• 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

  電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 116 (6), 566-567, 1996-06

Keywords

• 窒化ホウ素
• プラズマジェット

Details

• CRID: 1572824498927213824
• NII Article ID: 10002819799
• NII Book ID: AN10136312
• ISSN: 03854205
• Text Lang: ja
• Data Source:
  • CiNii Articles