電子線照射によりPMMA中に蓄積させた3次元空間電荷分布の測定

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  • Three-Dimensional Space Charge Distribution Measurement in Electron Beam Irradiated PMMA
  • デンシセン ショウシャ ニ ヨリ PMMAチュウ ニ チクセキサセタ 3ジゲン

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The localized space charge distribution in electron beam irradiated PMMA was investigated using pulsed electroacoustic method. Using a conventional space charge measurement system, the distribution only in the depth direction (Z) can be measured assuming the charges distributed uniformly in the horizontal (X-Y) plane. However, it is difficult to measure the distribution of space charge accumulated in small area. Therefore, we have developed the new system to measure the three- dimensional space charge distribution using pulsed electroacoustic method. The system has a small electrode with a diameter of 1mm and a motor-drive X-Y stage to move the sample. Using the data measured at many points, the threedimensional distribution were obtained. To estimate the system performance, the electron beam irradiated PMMA was used. The electron beam was irradiated from transmission electron microscope (TEM). The depth of injected electron was controlled using the various metal masks. The measurement results were compared with theoretically calculated values of electron range.

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