Electron Density Produced by Surface Corona Discharge on Ceramics of High Dielectric Constant with Needle Electrodes

• Shimizu Yukihiro

  Doshisha University

• Koto Masao

  Doshisha University

• Maruyama Atsushi

  Doshisha University

• Yukimura Ken

  Doshisha University

Bibliographic Information

Other Title

• 針電極を持つ高誘電率セラミックスを用いた沿面コロナによる生成電子密度
• ハリデンキョク オ モツ コウ ユウデンリツ セラミックス オ モチイタ エン

Abstract

As a fundamental research of corona preionization of a discharge-pumped KrF excimer laser, electrons produced by ultra violet light from a surface corona discharge on the planar ceramics of SrTiO₃ of 6800 of dielectric constant, are estimated for the applied voltage of 5 to 20kV under the conditions of Kr:He=1:99% at the pressure of 3atm. An electron drift current is measured at the gap apart from 10mm from the corona source for 1kV of applied voltage. It is a feature that plural needle electrodes are employed for efficient production of electrons. The observed corona current by the needle-plane electrode system reaches over 200A of the peak current of a sinusoidal waveform and increases with the applied voltage. The electron density in the order of 10⁸ to 10⁹cm^-3 is obtained, of which density is larger by about 20% than the case of an arc discharge at 20kV of charging voltage. It is found that the surface corona discharge occurred by the needle electrodes on a glass plate of a low dielectric constant does not reach a sufficient electron density for the preionization. A slit configuration of the electrodes on the ceramics of 6800 of dielectric constant does not bring a satisfied electrons either. It means that the large corona current should be flown concentratedly for obtaining a strong preionization. The electron density in the excimer laser gases of Kr/F₂/He is calculated based on the results of Kr/He gas mixtures by using a rate equation in which the electron attachment of fluorine gas is considered. It is found that the electron density of the order of 10⁶cm^-3 is obtained, which is considered to be enough to generate a stable glow-like pumping discharge for the excimer laser.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 117 (2), 172-178, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• 放電励起
• エキシマレーザ
• 予備電離
• 沿面コロナ
• ドリフト電流

Details

• CRID: 1390282679577340672
• NII Article ID: 10002821218
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms1990.117.2_172
• ISSN: 13475533
• ISSN: 03854205
• ISSN: http://id.crossref.org/issn/13418939
• NDL BIB ID: 4128386
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4128386
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/117/2/117_2_172/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed