書誌事項
- タイトル別名
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- Electron Density Produced by Surface Corona Discharge on Ceramics of High Dielectric Constant with Needle Electrodes
- ハリデンキョク オ モツ コウ ユウデンリツ セラミックス オ モチイタ エン
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As a fundamental research of corona preionization of a discharge-pumped KrF excimer laser, electrons produced by ultra violet light from a surface corona discharge on the planar ceramics of SrTiO3 of 6800 of dielectric constant, are estimated for the applied voltage of 5 to 20kV under the conditions of Kr:He=1:99% at the pressure of 3atm. An electron drift current is measured at the gap apart from 10mm from the corona source for 1kV of applied voltage. It is a feature that plural needle electrodes are employed for efficient production of electrons. The observed corona current by the needle-plane electrode system reaches over 200A of the peak current of a sinusoidal waveform and increases with the applied voltage. The electron density in the order of 108 to 109cm-3 is obtained, of which density is larger by about 20% than the case of an arc discharge at 20kV of charging voltage. It is found that the surface corona discharge occurred by the needle electrodes on a glass plate of a low dielectric constant does not reach a sufficient electron density for the preionization. A slit configuration of the electrodes on the ceramics of 6800 of dielectric constant does not bring a satisfied electrons either. It means that the large corona current should be flown concentratedly for obtaining a strong preionization. The electron density in the excimer laser gases of Kr/F2/He is calculated based on the results of Kr/He gas mixtures by using a rate equation in which the electron attachment of fluorine gas is considered. It is found that the electron density of the order of 106cm-3 is obtained, which is considered to be enough to generate a stable glow-like pumping discharge for the excimer laser.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 117 (2), 172-178, 1997
一般社団法人 電気学会
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詳細情報
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- CRID
- 1390282679577340672
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- NII論文ID
- 10002821218
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
- http://id.crossref.org/issn/13418939
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- NDL書誌ID
- 4128386
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- データソース種別
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- JaLC
- NDL
- Crossref
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