Effect of hydrogen on fluorination of surface

• Shibuya Kouji

  Musashi Institute of Technology

• Yumoto Motoshige

  Musashi Institute of Technology

• Sakai Takao

  Musashi Institute of Technology

Bibliographic Information

Other Title

• 表面のフッ化処理における水素混入の効果

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 117 (7), 777-778, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• フッ化
• 流れアフターグロー
• 水素
• フッ化水素

Details

• CRID: 1390001204600387712
• NII Article ID: 10002822466
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms1990.117.7_777
• ISSN: 13475533
• ISSN: 03854205
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/117/7/117_7_777/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles