Study of Cathode Spots and Gas Temperature in KrF Excimer Excited Discharges.

• MINAMITANI Yasushi

  Mitsubishi Electric Co.

• SAITOH Yoshio

  Mitsubishi Electric Co.

• SATO Yukio

  Mitsubishi Electric Co.

Bibliographic Information

Other Title

• KrFエキシマ励起放電中の陰極輝点とガス温度の検討

Journal

• 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

  電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 117 (7), 779-780, 1997-07

Keywords

• エキシマレーザ
• 陰極輝点
• 励起放電平均温度
• 電荷量

Details

• CRID: 1571980073987265024
• NII Article ID: 10002822470
• NII Book ID: AN10136312
• ISSN: 03854205
• Text Lang: ja
• Data Source:
  • CiNii Articles