Surface Characterization of TiN Prepared by Plasma Source Ion Implantation
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- MIKI Shinichi
- Himeji Institute of Technology
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- YATSUZUKA Mitsuyasu
- Himeji Institute of Technology
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- HASHIMOTO Yoshiyuki
- Kobe City College of Technology
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- YAMASAKI Tohru
- Himeji Institute of Technology
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- UCHIDA Hitoshi
- Himeji Institute of Technology
Bibliographic Information
- Other Title
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- プラズマソースイオン注入法によるTiN相の作製とその特性評価
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Journal
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- 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society
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電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 117 (8), 891-892, 1997-08
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Keywords
Details 詳細情報について
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- CRID
- 1571417124033957376
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- NII Article ID
- 10002822680
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- NII Book ID
- AN10136312
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- ISSN
- 03854205
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- Text Lang
- ja
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- Data Source
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- CiNii Articles