Characteristic of Repetitive Ratio Dependence of Gas Lifetime in KrF Excimer Laser

• MINAMITANI Yasushi

  Mitsubishi Electric Co.

• SAITOH Yoshio

  Mitsubishi Electric Co.

• ITOH Hiroshi

  Mitsubishi Electric Co.

• SATO Yukio

  Mitsubishi Electric Co.

Bibliographic Information

Other Title

• KrFエキシマレーザガス寿命の繰り返し周波数依存性

Journal

• 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society

  電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 117 (11), 1143-1144, 1997-11

Keywords

• KrFエキシマレーザ
• ガス寿命
• 繰り返し周波数
• 充電電圧
• フッ素濃度

Details

• CRID: 1570854174080526976
• NII Article ID: 10002823126
• NII Book ID: AN10136312
• ISSN: 03854205
• Text Lang: ja
• Data Source:
  • CiNii Articles