Numerical analysis of lead structure and lead formation process using RIE for spin-valve heads with lead overlaid structure

• KOMURO M.

  CRL, Hitachi, Ltd.

• YOSHIDA N.

  CRL, Hitachi, Ltd.

• OKADA T.

  CRL, Hitachi, Ltd.

• KAWATO Y.

  CRL, Hitachi, Ltd.

• FUYAMA M.

  CRL, Hitachi, Ltd.

• FUKUI H.

  CRL, Hitachi, Ltd.

Bibliographic Information

Other Title

• 電極オーバーラップ型スピンバルブヘッドの電極構造とRIE法による電極加工

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 22 79-, 1998-09-01

Details

• CRID: 1573387448870891264
• NII Article ID: 10002824102
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles