Praparation of AIN films for the gap layers prepared by magnetron sputtering enhanced with an inductively coupled rf plasma

• MORITA T.

  Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd.

• YAMAMOTO T.

  Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd.

• KURAUCHI T.

  Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd.

• MATSUURA M.

  Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd.

Bibliographic Information

Other Title

• 誘導結合rfプラズマ支援マグネトロンスパッタ法によるギャップ用AIN膜の作製

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 22 81-, 1998-09-01

Details

• CRID: 1572543023940763008
• NII Article ID: 10002824107
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles