Etched Features and Redeposition in CO-NH_3 Reactive-Ion Etching for Ferromagnetic Alloys

• NAKATANI Isao

  National Research Institute for Metsals

Bibliographic Information

Other Title

• 強磁性合金に対するCO-NH_3系反応性イオンエッチングにおけるエッチング形状と再付着の形態

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 22 413-, 1998-09-01

Details

• CRID: 1572824498917492736
• NII Article ID: 10002824965
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles