Characterstics of Silicon Capacitive Accelerometer Developed by Micromachining Technique
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- NISHIZAWA Mitsutomo
- Faculty of Engineering, Graduate School of Tohoku University
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- LIM Geunbae
- SAIT SAMSUNG Advanced Institute of Technology
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- NIITSUMA Hiroaki
- Faculty of Engineering, Graduate School of Tohoku University
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- ESASHI Masayoshi
- Faculty of Engineering, Graduate School of Tohoku University
Bibliographic Information
- Other Title
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- マイクロマシニングによるシリコン容量型加速度センサの製作とその特性
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Journal
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- 物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference
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物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference 98 101-105, 1998-06
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Details 詳細情報について
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- CRID
- 1572261548964268544
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- NII Article ID
- 10002839515
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- NII Book ID
- AN10532932
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- Text Lang
- ja
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- Data Source
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- CiNii Articles