Effect of Floating Capacity on the Measurement Error of the CBP Method.

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  • ＣＢＰ法による円運動の測定精度に及ぼす浮遊容量の影響
  • CBPホウ ニヨル エン ウンドウ ノ ソクテイ セイド ニ オヨボス フユウ

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Abstract

Measurement error of the CBP, capacitance ball probes, method caused by the floating capacity has been discussed by means of the IEM, integral element method. The CBP method was developed by the authors to precisely measure the circular motion errors of a high precision CNC grinding machine. In this method two precision steel balis, one is the sensing probe connected to the capacitive meter and the other is grounded, are utilized. In the measurement of the circular motion, change in clearance between two ball probes is sensitively detected. The detected data, however, tend to be affected by the floating capacity which is generated between sensing probe and adjacent bodies. The measurement error caused by the floating capacity is almost proportional to the setting clearance between two balls and it sharply increases with the diameter of the sensing probe. When the sensing probe is sandwiched between auxiliary electrodes, distortion of the lines of electric force between two probes is suppressed and the measurement error is successfully diminished.

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