High Efficiency Micro-Processing with a Multi-Zone Homogenizer
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- SATO Y.
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
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- YAMAMOTO T.
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
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- SAITO Y.
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
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- SASAGAWA T.
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
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- INOUE M.
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
Bibliographic Information
- Other Title
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- マルチゾーンホモジナイザによる高効率微細加工
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Journal
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- レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan
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レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 244 31-37, 1997-09-24
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Details 詳細情報について
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- CRID
- 1572543023937116800
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- NII Article ID
- 10002879477
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- NII Book ID
- AA11604414
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- Text Lang
- ja
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- Data Source
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- CiNii Articles