Laser Ablation Processing of Quartz Glass by Deep UV Lasers

• JITSUNO T.

  Institute of Laser Engineering, Osaka Univ

• MIKATA H.

  Institute of Laser Engineering, Osaka Univ

• TOKUMURA K.

  NALUX CO. Ltd

Bibliographic Information

Other Title

• 短波長紫外レーザーによる石英のアブレーション加工

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 259 29-33, 1998-12-14

Details

• CRID: 1573668923844224256
• NII Article ID: 10002880136
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles