Laser Ablation Processing of Quartz Glass by Deep UV Lasers
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- JITSUNO T.
- Institute of Laser Engineering, Osaka Univ
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- MIKATA H.
- Institute of Laser Engineering, Osaka Univ
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- TOKUMURA K.
- NALUX CO. Ltd
Bibliographic Information
- Other Title
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- 短波長紫外レーザーによる石英のアブレーション加工
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Journal
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- レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan
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レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 259 29-33, 1998-12-14
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Details 詳細情報について
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- CRID
- 1573668923844224256
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- NII Article ID
- 10002880136
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- NII Book ID
- AA11604414
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- Text Lang
- ja
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- Data Source
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- CiNii Articles