Laser Micro-Processing by Coaxially Excited Pulsed CO_2 Laser

• NISHI N.

  Usho Optical Systems CO., Ltd.

• NAKAJIMA Y.

  Usho Optical Systems CO., Ltd.

• JITSUNO T.

  ILE Osaka Univ.

Bibliographic Information

Other Title

• 同軸パルス励起炭酸ガスレーザーによる微細加工

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 261 9-14, 1999-02-26

Details

• CRID: 1570009749147039360
• NII Article ID: 10002880262
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles