Development of Novel Oxide Soft-X-Ray Mirrors by Atomic Layer Deposition Method

• KUMAGAI H.

  RIKEN

• KOBAYASHI K.

  Keio Univ.

• IIMURA Y.

  RIKEN

• TOYODA K.

  RIKEN

• OBARA M.

  Keio Univ.

Bibliographic Information

Other Title

• 原子層堆積法による新しい酸化物軟X線ミラーの開発

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 17 117-, 1997-01-01

Details

• CRID: 1574231873797714816
• NII Article ID: 10002882144
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles