Nano-scale processing of organic materials by using rare-gas excimer VUV lamps excited by a silent discharge

• TOKUNAGA S.

  Miyazaki Univ.

• KAWANAKA J.

  Miyazaki Univ.

• KUBODERA S.

  Miyazaki Univ.

• YOKOTANI A.

  Miyazaki Univ.

• KUROSAWA K.

  Miyazaki Univ.

• SASAKI W.

  Miyazaki Univ.

Bibliographic Information

Other Title

• 無声放電励起真空紫外希ガスエキシマランプによる有機物質の超微細加工

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 17 145-, 1997-01-01

Details

• CRID: 1570291224123771648
• NII Article ID: 10002882191
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles