KrF Double-Pulse Excimer Laser Irradiation for Formation of Deeply Doped Layer in Si.
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- JYUMONJI Masayuki
- Tokyo Denki University
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- OBATA Kotaro
- Tokyo Denki University
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- SIMAZU Toshiyuki
- Tokyo Denki University
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- SUGIOKA Koji
- RIKEN
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- TAKAI Hiroshi
- Tokyo Denki University
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- TOYODA Koichi
- RIKEN
Bibliographic Information
- Other Title
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- KrFダブルパルスエキシマレーザー照射によるSiへの深い拡散層の高速形成 -コンピュータシミュレーションによる解析-
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Journal
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- レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers
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レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 17 156-, 1997-01-01
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Details 詳細情報について
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- CRID
- 1572261548960621440
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- NII Article ID
- 10002882202
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- NII Book ID
- AA11604265
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- ISSN
- 09136355
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- Text Lang
- ja
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- Data Source
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- CiNii Articles