Growth of epitaxial TiN thin film on Si substrate by pulsed laser deposition(II)
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- XU Shifa
- The Institute of Physical and Chemical Research(RIKEN)
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- DU Liren
- The Institute of Physical and Chemical Research(RIKEN)
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- SUGIOKA Koji
- The Institute of Physical and Chemical Research(RIKEN)
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- JYUMONJI Masayuki
- The Institute of Physical and Chemical Research(RIKEN)
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- TOYODA Koichi
- The Institute of Physical and Chemical Research(RIKEN)
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収録刊行物
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- レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers
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レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 17 181-, 1997-01-01
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詳細情報 詳細情報について
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- CRID
- 1573387448867467648
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- NII論文ID
- 10002882241
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- NII書誌ID
- AA11604265
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- ISSN
- 09136355
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles