Photochemical Cleaning of Si Surface for Fabrication of SiO_2 Thin Film

• IIZUKA H.

  Tokai University

• OKAMOTO T.

  Tokai University

• MORI T.

  Tokai University

• MOCHIDUKI M.

  Tokai University

• NAKADA K.

  Tokai University

• MURAHARA M.

  Tokai University

Bibliographic Information

Other Title

• SiO_2膜形成を目的としたSi表面の光化学的クリーニング

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 18 132-, 1998-01-01

Details

• CRID: 1574231873797670144
• NII Article ID: 10002882870
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles