ArF Excimer Laser induced photochemical growth of copper Thin film on polyimide surface

• ISHII S.

  Tokai University

• HATAO K.

  Tokai University

• ITO S.

  Tokai University

• IKEGAME T.

  Tokai University

• TOMITA M.

  Tokai University

• MURAHARA M.

  Tokai University

Bibliographic Information

Other Title

• ArFエキシマレーザーによるポリイミド表面への銅薄膜形成

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 18 158-, 1998-01-01

Details

• CRID: 1570572699100309248
• NII Article ID: 10002882914
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles