Etching of fluorocarbon thin film and metal fluoride thin film using SR ablation
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- KAMIIISAKA Jun
- nagoya university
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- ITO Masahumi
- nagoya university
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- HORI Masaru
- nagoya university
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- GOTO Toshio
- nagoya university
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- HIRAMATU Mineo
- meijo university
Bibliographic Information
- Other Title
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- SR光によるCF_2薄膜およびフロライド金属薄膜の微細加工
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Journal
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- レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers
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レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 19 80-, 1999-01-01
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Details 詳細情報について
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- CRID
- 1571980073983923712
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- NII Article ID
- 10002883592
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- NII Book ID
- AA11604265
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- ISSN
- 09136355
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- Text Lang
- ja
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- Data Source
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- CiNii Articles