Preparation of oxide thin films by excimer lamps
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- TAKEZOE N.
- Miyazaki Univ.
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- YOKOTANI A.
- Miyazaki Univ.
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- KUROSAWA K.
- Miyazaki Univ.
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- SASAKI W.
- Miyazaki Univ.
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- MATSUNO H.
- USHIO INC.
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- IGARASHI T.
- USHIO INC.
Bibliographic Information
- Other Title
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- エキシマランプを用いた酸化物薄膜の作成
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Journal
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- レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers
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レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 19 83-, 1999-01-01
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Details
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- CRID
- 1571135649053914368
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- NII Article ID
- 10002883608
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- NII Book ID
- AA11604265
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- ISSN
- 09136355
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- Text Lang
- ja
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- Data Source
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- CiNii Articles