Measurement of negative ion density in processing plasmas using photodetachment techniques

• OHYA Yoshinobu

  Grad. School of Eng., Nagoya Univ.

• KONO Akihiro

  CCRAST, Nagoya Univ.

Bibliographic Information

Other Title

• レーザー光脱離法によるプロセスプラズマ中の負イオン密度計測

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 19 118-, 1999-01-01

Details

• CRID: 1572824498914098560
• NII Article ID: 10002883710
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles