シリコンメルト表面の非接触温度測定

• NAKAMURA Shin

  Fundamental Research Labs., NEC Corp.

• EGUCHI Minoru

  Fundamental Research Labs., NEC Corp.

• AZAMI Takeshi

  Fundamental Research Labs., NEC Corp.

• HIBIYA Taketoshi

  Fundamental Research Labs., NEC Corp.

Bibliographic Information

Other Title

• Non-contact Method to measure Temperature of Molten Silicon Surface

Journal

• JASMA : Journal of the Japan Society of Microgravity Application

  JASMA : Journal of the Japan Society of Microgravity Application 15 55-, 1998-10-01

Details

• CRID: 1570572699107148928
• NII Article ID: 10002914023
• NII Book ID: AN10537663
• ISSN: 09153616
• Text Lang: en
• Data Source:
  • CiNii Articles