Novel Gas Sensor Device based on Thin MoO_3 Film and Low Power-Consumption Micromachined Si-Based Structure
収録刊行物
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- Proc., Transducers '97
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Proc., Transducers '97 943 1997
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詳細情報
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- CRID
- 1573105973958168192
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- NII論文ID
- 10003344842
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- データソース種別
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- CiNii Articles