Control Strategies Applied to Sub-micrometer Positioning
収録刊行物
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- 9th Int. Precision Engineering Seminar/4th Int. Conf. on Ultra-precision in Manufacturing Engineering (9-IPES/UME4)
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9th Int. Precision Engineering Seminar/4th Int. Conf. on Ultra-precision in Manufacturing Engineering (9-IPES/UME4) 464 1997