書誌事項
- タイトル別名
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- Development of Ultraprecision Table for Ductile Mode Cutting.
- エンセイ モード セッサク カコウヨウ ノ チョウ セイミツ ヘンイダイ ノ
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抄録
In order to correct the defects of the conventional ultraprecision tables, the ultraprecision table with a machined point control type was newly developed and the ductile mode cutting for brittle materials was achieved. The table which is subject to Abbe's principle in the vertical cutting direction consists of a piezoelectric actuator and a laser measuring system as the feedback sensor. In the horizontal feed direction it is moved by a DC servomotor and steel-belt. Its vertical positioning resolution is 5 nm, the straightness is 10 nm in the 100 mm stroke and the static rigidity is infinite by a PI-D control, but the dynamic rigidity is a little poor due to mechanical resonance. The silicon cutting test using this table shows a good result which can discriminate between the ductile mode cutting and brittle mode cutting by use of an AE sensor and cutting resistance ratio.
収録刊行物
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- 精密工学会誌
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精密工学会誌 64 (4), 546-551, 1998
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204765276800
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- NII論文ID
- 110001372421
- 10003572840
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 4446867
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
