原子間力顕微鏡によるマイカのナノメータスケールの機械加工

• 三宅 正二郎

  正会員 日本工業大学工学部

• 石井 正紀

  日本工業大学大学院

• 大竹 利明

  日本工業大学大学院

• 津嶋 尚武

  日本工業大学大学院

書誌事項

タイトル別名

• Nanometer-scale Mechanical Processing of Muscovite Mica by Atomic Force Microscope.
• ゲンシカンリョク ケンビキョウ ニヨル マイカ ノ ナノメータ スケール ノ

抄録

Atomic-scale mechanical processing of a layered crystal structure material, muscovite mica was performed using an atomic force microscope (AFM). The atomic scale processing phenomenon was evaluated from lateral force and surface atomic topographic changes caused by sliding. Above about 100 nN load, grooves were formed on the damage-free mica surface. The processing depth dependence on load was evaluated. The depth of the processed grooves increased with load. Processing lateral force estimated from the torsion of the tip beam was divided into plowing force and friction force. The plowing force is proportional to processed depth. Several cycles of mechanical sliding of the tip generated a 1-nm-deep groove by removing potassium from the surfaces which corresponded to the distance from the top surface of SiO₄ to the top surface of the next SiO4 layer beneath it. A groove with four steps of one-nm depth was processed by stepwise mechanical sliding. Atomic images of each step surface of the groove corresponding to the SiO₄ basal plane were observed. Then the letters NIT (scale 2000 × 600 × 1nm) was processed by mechanical tip sliding.

収録刊行物

• 精密工学会誌

  精密工学会誌 63 (3), 426-430, 1997

  公益社団法人 精密工学会

キーワード

• nanometer-scale processing
• atomic force microscope
• mechanical processing and muscovite mica

詳細情報

• CRID: 1390001204764573696
• NII論文ID: 110001367797
• NII論文ID: 10003572855
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.63.426
• ISSN: 1882675X
• ISSN: 09120289
• ISSN: http://id.crossref.org/issn/09120289
• NDL書誌ID: 4160131
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4160131
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可