チタンのプラズマ浸炭窒化による硬質Ｔｉ（Ｃ，Ｎ）層の作製

• 佐藤 貴康

  東京理科大学理工学部大学院 日本学術振興会特別研究員

• 伊藤 滋

  東京理科大学理工学部

• 明石 和夫

  東京理科大学理工学部

書誌事項

タイトル別名

• Preparation of hardened Ti (C, N) layer by plasma carbonitriding of Ti.
• チタン ノ プラズマ シンタン チッカ ニヨル コウシツ Ti C N ソウ

抄録

Plasma carbonitriding process has been applied to preparation of hard Ti(C, N) layer on the surface of titanium plate at relatively low temperatures. The formation of thick Ti(C, N) layer was confirmed by means of XRD and ESCA measurements and Vickers hardness test. The carbonitriding was carried out in an r.f. (4 MHz) glow plasma generated in quartz tube using N₂–C₂H₂ gas mixtures. The Ti(C, N) layer consisted of continuous solid solution of TiN and TiC. With increase in the C₂H₂ ratio of carbonitriding gas, the thickness of carbonitriding layer somewhat decreased, but the friction coefficient of the surface was improved and its value was similar with that of commercial TiN films for cutting tools. The addition of inert gas (He, Ar) into N₂–C₂H₂ gas somewhat decreased the thickness of the carbonitriding layer, while the surface roughness of carbonitrided Ti was rather improved. It may be presumed that the bombardment of massive inert gas ion assists to make the surface more smooth.

収録刊行物

• 軽金属

  軽金属 47 (6), 317-322, 1997

  一般社団法人 軽金属学会

キーワード

• plasma carbonitriding
• Ti
• TiN
• Ti(C, N)
• ESCA
• friction coefficient

詳細情報

• CRID: 1390282681314304256
• NII論文ID: 10003795518
• NII論文ID: 10003469358
• NII書誌ID: AN00069773
• DOI: 10.2464/jilm.47.317
• COI: 1:CAS:528:DyaK2sXksVOmsbo%3D
• ISSN: 18808018
• ISSN: 04515994
• NDL書誌ID: 4248959
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4248959
• 本文言語コード: ja
• データソース種別:
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