Evaluation of Anisotropic Lattice Strain of Co<SUB>9</SUB>Fe/Cu Superlattice by Grazing Incidence X-ray Scattering Method

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  • Sato S.
    Institute for Advanced Materials Processing, Tohoku University
  • Saito M.
    Institute for Advanced Materials Processing, Tohoku University
  • Matsubara E.
    Department of Materials Science and Engineering, Graduate School, Kyoto University
  • Waseda Y.
    Institute for Advanced Materials Processing, Tohoku University
  • Inomata K.
    Toshiba Corporation, Research and Development Center

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  • Evaluation of Anisotropic Lattice Strain of Co9Fe/Cu Superlattice by Grazing Incidence X-ray Scattering Method
  • Evaluation of Anisotropic Lattice Strai

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Abstract

Two different X-ray scattering experiments of θ-2θ X-ray scattering and grazing incidence X-ray scattering (GIXS) geometries have been done for evaluating the lattice strain anisotropically formed in the Co9Fe/Cu superlattices. The magnitude of lattice strain along Cu [001] and [110] directions which are parallel to the surface was estimated using GIXS geometry. The results confirm that the lattice strain along both directions increases with decreasing Cu thickness and its degree changes with a variation in orientation. On the other hand, the magnitude of lattice strain along two directions of Cu [110] (parallel to the surface) and Cu [1\bar10] (perpendicular to the surface) is found to differ from each other by comparing the lattice strain estimated from the measurements for equivalent Cu 220 reflections. The present results clearly suggest that the lattice strain formed in the Co9Fe/Cu superlattices depends upon the lattice orientation.

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