縦型ホール素子の特性と高感度化

• 前中 一介

  姫路工大

• 大楠 達郎

  豊橋技科大

• 藤田 晴光

  豊橋技科大

• 前田 宗雄

  姫路工大

書誌事項

タイトル別名

• Characteristics of Vertical Hall Cells and Improvement of Their Sensitivity.
• タテガタ ホール ソシ ノ トクセイ ト コウカンドカ

抄録

This paper deals with detailed characteristics and improvement of the sensitivity of vertical Hall cells. The vertical Hall cells are useful devices for realizing a two-or three-dimensional magnetic sensor system because they can detect the magnetic field parallel to the chip surface. First, we focused on the behavior of the offset voltage of the vertical Hall cells which is the most important specification for a practical system. The experiments showed that there is an optimum geometry with respect to the offset voltage and the spatial resolution, and the offset stability with the applied stress of vertical Hall cells is 10 to 100 times as great as that of lateral Hall cells. Moreover, we attempted a drastic improvement of the sensitivity by using trench grooves to restrict the current path. As a result, a very high product sensitivity of 1230V/AT was obtained.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 117 (7), 364-370, 1997

  一般社団法人 電気学会

キーワード

• 磁気センサ
• ホール素子
• 集積化センサ
• 多次元センサ

詳細情報

• CRID: 1390001204462189824
• NII論文ID: 10004832273
• NII論文ID: 10003867789
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.364
• ISSN: 13475525
• ISSN: 13418939
• ISSN: http://id.crossref.org/issn/13418939
• NDL書誌ID: 4237372
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4237372
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/7/117_7_364/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可