Uniform Growth of Compound Semiconductor in Large Area by a Fast Water Rotating MOCVD Reactor

• SATO Y.

収録刊行物

• Forum on Micro Fluid Mechanics

  Forum on Micro Fluid Mechanics 113 53-57, 1991

詳細情報

• CRID: 1572261549127834496
• NII論文ID: 10004016197
• データソース種別:
  • CiNii Articles