Standard Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption

• ASTM Method F 121-83

収録刊行物

• Annual Book of ASTM Standards

  Annual Book of ASTM Standards 10 1987

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• CRID: 1573387449044630784
• NII論文ID: 10004165778
• NII書誌ID: AA00533846
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