スピニングロータ真空計の圧力測定限界

• 上田 映介

  北海道大学工学部

• 広畑 優子

  北海道大学工学部

• 日野 友明

  北海道大学工学部

• 山科 俊郎

  北海道大学工学部

書誌事項

タイトル別名

• Lower Limit of Pressure Measurement of Spinning Rotor Gauge.
• スピニングロータ シンクウケイ ノ アツリョク ソクテイ ゲンカイ

抄録

The argon pressure measured by a spinnig rotor gauge (MKS SRG-2), P_SRG, has been compared to the pressure measured by an ionization gauge, P_IG. The linearity of P_SRG as compared to P_IG was previausly observed between 10^-1 and 10^-4 Pa using the average value of the residual drag, P_OFS, by other authors. In the present study, the value of P_OFS has been newly determined using data obtained in the range above 2×10^-5 Pa, where the fluctuation of P_OFS becomes relatively small. P_OFS was determined such that the standard deviation of [Log (P_IG) -Sa⋅Log (P_SRG-P_OFS) -Log (Sb)] was minimized. Here, Sa and Sb are constants and nearly equal 1. The linearity was found to extend to a lower pressure region using the P_OFS obtained in present method, as opposed to that obtained by the conventional averaging method. It was found that the standard deviation of P_SRG at constant pressure was proportional to T^-2.5, where T is a sampling interval used with the SRG. This relation is valid up to 10^-6 Pa.

収録刊行物

• 真空

  真空 36 (4), 414-419, 1993

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390001204064461312
• NII論文ID: 10007959908
• NII論文ID: 10004167557
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.36.414
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 3818553
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3818553
• 本文言語コード: ja
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可