A comparison of squeeze-film theory with measurements on a microstructure

• ANDREWS M.

収録刊行物

• Sensors and Actuators A

  Sensors and Actuators A 36 79-87, 1993

詳細情報

• CRID: 1573668924043892608
• NII論文ID: 10004184587
• データソース種別:
  • CiNii Articles