Pin Joint, Gears, Springs, Cranks, and Other Novel Micromechanical Structures

• FAN L. S.

収録刊行物

• Tech. digest of Transducers '87(The 4th International Conference on Solid-State Sensors and Actuators)

  Tech. digest of Transducers '87(The 4th International Conference on Solid-State Sensors and Actuators) 849-852, 1987

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• CRID: 1573668924005006336
• NII論文ID: 10004221654
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