Application and Comparison of Alternative Position Sensors in High-Accuracy Control of an X-Y Table
Journal
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- Proc. IEEE International Workshop on Advanced Motion Control(AMC'96)
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Proc. IEEE International Workshop on Advanced Motion Control(AMC'96) 494-499, 1996
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Details 詳細情報について
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- CRID
- 1573387449028143360
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- NII Article ID
- 10004224442
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- Data Source
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- CiNii Articles