Microfabrication and parallel operation of 5x5 2D AFM cantilever arrays for data strage and imaging

• LUTWYCHE

収録刊行物

• Proc. 11th Int. Workshop on MEMS

  Proc. 11th Int. Workshop on MEMS 8-11, 1998

詳細情報

• CRID: 1570291224291158016
• NII論文ID: 10004259390
• データソース種別:
  • CiNii Articles