Effect of Cadmium Precursor Solutions on the Fabrication of CdS Thin Films by Successive Ionic Layer Adsorption and Reaction(SILAR)Technique
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- SASAGAWA Mariko
- Nagaoka University of Technology
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- NISHINO Junichi
- Nagaoka University of Technology
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- NOSAKA Yoshio
- Nagaoka University of Technology
書誌事項
- タイトル別名
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- Effect of Cadmium Precursor Solutions on Fabrication of CdS Thin Films by Successive Ionic Layer Adsorption and Reaction (SILAR) Technique
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抄録
<p>CdS thin films were fabricated on ITO-covered glass by successive ionic layer adsorption and reaction (SILAR) technique. The thickness of the CdS thin films increased with increasing the number of SILAR cycles. However, it was about 1/3 of the thickness expected from the ideal deposition process. The surface roughness increased as growth of CdS thin films. To increase the film thickness and to reduce the film roughness, we tried to change counter ions of cadmium ion source solution and to add chelating agent to the solution. In case of using CdCl2 and triethanolamine, the film thickness was increased and the surface roughness was reduced.</p>
収録刊行物
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- Electrochemistry
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Electrochemistry 67 (12), 1237-1239, 1999-12-05
公益社団法人 電気化学会
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詳細情報 詳細情報について
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- CRID
- 1390001277393460736
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- NII論文ID
- 10004275563
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- NII書誌ID
- AN00151637
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- ISSN
- 21862451
- 13443542
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- HANDLE
- 10649/00000969
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- NDL書誌ID
- 4927739
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用可