Fine-Grained SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub> Thin Films by Low Temperature Annealing
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- Ogata Nobuhito
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Nagata Masaya
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Ishihara Kazuya
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Urashima Hitoshi
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Okutoh Akira
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Yamazaki Shinobu
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Mitarai Shun
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
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- Kudo Jun
- Functional Devices Research Laboratories, Sharp Corporation, 2613–1 Ichinomoto–cho, Tenri, Nara 632, Japan
書誌事項
- タイトル別名
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- Fine-Grained SrBi2Ta2O9 Thin Films by Low Temperature Annealing.
- Fine-Grained SrBi2Ta2O9 Thin Films by L
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抄録
A new low pressure annealing method for preparation of SrBi2Ta2O9 thin films is proposed. These thin films were prepared on Pt/TiO2/SiO2/Si substrates by the metalorganic decomposition (MOD) method, and their structural and electrical properties were investigated. Low pressure annealing was performed at 650°C for 60 min in a 2 Torr oxygen ambient per coating. The films were well crystallized and exhibited fine-grained and dense structures with grain size of about 50 nm. Pr=4.9 µ C/cm2, Ec=24 kV/cm, IL=8.6× 10-8 A/cm2 at a applied voltage of 3 V and breakdown voltage (VB) of over 20 V were obtained for the 200-nm-thick films. Futhermore, in the 100-nm-thick SBT film, a saturation voltage of 1 V was obtained. Pr=3.6 µ C/cm2, Ec=25 kV/cm, IL=5.5× 10-8 A/cm2 at 1 V and VB was over 10 V. Therefore, this method is very useful for highly integrated ferroelectric nonvolatile memory application.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 37 (6A), 3481-3485, 1998
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206249688064
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- NII論文ID
- 210000043313
- 30021831285
- 10004289372
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- NDL書誌ID
- 4514019
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可